VizGlow Example: ES-EM wave in CCP reactor (no plasma)

VizGlow Example: Coupled Electrostatic-EM Wave in a CCP Reactor (without plasma)

This example shows movies of the electrostatic potential field (driven by powered electrode) and the resulting electromagnetic field solutions. The drive frequency is 100 MHz and powered electrode peak voltage is 300 V. The electromagnetic fields can contribute to total power deposition in the reactor and importantly to the distribution of power deposited in the reactor. The plasma-EM wave coupled simulation capability of VizGlow is used in this example, with the plasma itself switched off.

Geometry and Mesh

Electrostatic potential (in GAS subdomain only)

Radial magnetic vector potential (in GAS subdomain only)

Axial magnetic vector potential (in GAS subdomain only)

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