VizGlow™ is a robust, industrial simulation tool for high-fidelity modeling of non-equilibrium plasma discharges. As part of the OverViz Simulation Suite, it can be fully coupled with electromagnetic, fluid flow, and kinetic particle models to provide solutions to a wide range of complex multiphysics problems. It has been used to analyze discharges ranging from low pressure plasma reactors at a few mTorr to high pressure streamers at 15atm, all with a single solver. VizGlow™ is fully parallelized and can be used to perform large, 3D simulations with complex geometries. Its robust solvers and scalability make it ideal for solving real world engineering problems.
Features:
- 1D, 2D (planar / axisymmetric) and 3D problems
- Self-consistent (sheath + plasma) and quasi-neutral formulation
- Multi-species, multi-temperature formulation
- Finite-rate gas chemistry (complex gas mixtures) and surface chemistry (etching, deposition, etc.)
- Coupling to electromagnetics and fluid-flow
- Coupling to kinetic particle models for hybrid plasma simulation
- Photoionization model
- General circuit model
- Valid over range of pressures ~mTorr to 10+atm.
- Unstructured mixed mesh framework
- Parallel computing
Applications:
- Thin film etching / deposition / cleaning
- Semiconductor processing
- Semiconductor equipment design
- Chemical vapor deposition
- Lighting and display
- Aerodynamic flow control
- Chemical processing
- Combustion ignition / stabilization
- Biomedical (e.g. sterilization)
- Plasma propulsion
- Plasma metamaterials
Discharge Types:
- Capacitively Coupled Plasmas (CCP)
- Inductively Coupled Plasmas (ICP)
- Microwave Plasmas (MWP)
- Direct Current (DC) Plasmas
- Atmospheric Pressure Plasmas (APP)
- Microdischarges (MD)
Industries Served:
- Semiconductor equipment makers
- Semiconductor IC manufacturers
- Solar cell manufacturers
- Flat-panel display manufacturers
- Automotive industry (e.g. next generation combustion ignition)
- Aerospace industry (e.g. flow control, plasma propulsion)
- Electrical device manufacturers
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