VizGlow™ is a robust, industrial simulation tool for high-fidelity modeling of non-equilibrium plasma discharges. As part of the OverViz Simulation Suite, it can be fully coupled with electromagnetic, fluid flow, and kinetic particle models to provide solutions to a wide range of complex multiphysics problems. It has been used to analyze discharges ranging from low pressure plasma reactors at a few mTorr to high pressure streamers at 15atm, all with a single solver. VizGlow™ is fully parallelized and can be used to perform large, 3D simulations with complex geometries. Its robust solvers and scalability make it ideal for solving real world engineering problems.

Features:

  • 1D, 2D (planar / axisymmetric) and 3D problems
  • Self-consistent (sheath + plasma) and quasi-neutral formulation
  • Multi-species, multi-temperature formulation
  • Finite-rate gas chemistry (complex gas mixtures) and surface chemistry (etching, deposition, etc.)
  • Coupling to electromagnetics and fluid-flow
  • Coupling to kinetic particle models for hybrid plasma simulation
  • Photoionization model
  • General circuit model
  • Valid over range of pressures ~mTorr to 10+atm.
  • Unstructured mixed mesh framework
  • Parallel computing

 

Applications:

  • Thin film etching / deposition / cleaning
  • Semiconductor processing
  • Semiconductor equipment design
  • Chemical vapor deposition
  • Lighting and display
  • Aerodynamic flow control
  • Chemical processing
  • Combustion ignition / stabilization
  • Biomedical (e.g. sterilization)
  • Plasma propulsion
  • Plasma metamaterials

Discharge Types:

Plasma Processing with Carbon and Fluorine
Plasma Processing with Carbon and Fluorine

 As the semiconductor industry continues to shrink critical feature sizes and improve device performance, challenges in etch processing are increasing as a result of smaller features being processed with new device structures. Higher density and...

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Fulfilling the Need for Plasma Experts
Fulfilling the Need for Plasma Experts

The Fourth State; The First Priority With renewed investment in the semiconductor industry by both the American government and private investors, opportunities for the next generation of American engineers are set to soar as the United States...

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