VizGlow™ is a robust, industrial simulation tool for high-fidelity modeling of non-equilibrium plasma discharges. As part of the OverViz Simulation Suite, it can be fully coupled with electromagnetic, fluid flow, and kinetic particle models to provide solutions to a wide range of complex multiphysics problems. It has been used to analyze discharges ranging from low pressure plasma reactors at a few mTorr to high pressure streamers at 15atm, all with a single solver. VizGlow™ is fully parallelized and can be used to perform large, 3D simulations with complex geometries. Its robust solvers and scalability make it ideal for solving real world engineering problems.


  • 1D, 2D (planar / axisymmetric) and 3D problems
  • Self-consistent (sheath + plasma) and quasi-neutral formulation
  • Multi-species, multi-temperature formulation
  • Finite-rate gas chemistry (complex gas mixtures) and surface chemistry (etching, deposition, etc.)
  • Coupling to electromagnetics and fluid-flow
  • Coupling to kinetic particle models for hybrid plasma simulation
  • Photoionization model
  • General circuit model
  • Valid over range of pressures ~mTorr to 10+atm.
  • Unstructured mixed mesh framework
  • Parallel computing



  • Thin film etching / deposition / cleaning
  • Semiconductor processing
  • Semiconductor equipment design
  • Chemical vapor deposition
  • Lighting and display
  • Aerodynamic flow control
  • Chemical processing
  • Combustion ignition / stabilization
  • Biomedical (e.g. sterilization)
  • Plasma propulsion
  • Plasma metamaterials

Discharge Types:

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Plasma Processing with Carbon and Fluorine
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