VizGlow Example: Coupled Plasma-EM wave Effects in CCP Reactor
This example presents representative results from a coupled plasma-EM wave simulation for a generic CCP reactor driven by 100 MHz, 300 W powered electrode. Important plasma and electromagnetic wave solutions are presented.
Geometry and Mesh
Electrostatic (ES) potential Electron density
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Radial Magnetic Vector Potential Axial Magnetic Vector Potential
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Cycle-averaged ES Joule heating Cycle-averaged EM wave heating
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