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ChemZone: Simple Platform for Complex Chemistries

August 1st, 2018 ChemZone Plasma Simulation

Our flagship product, VizGlow, is a powerful, multi-dimensional software tool for simulating industrial, non-equilibrium plasmas. VizGlow can resolve spatial and time accurate plasma discharges with […]


Fluid vs Hybrid Plasma Formulations for IEADFs in Semiconductor Reactors

February 20th, 2018 Capacitively Coupled Plasma Simulation in VizGlow

Ion energy and angular distribution functions (IEADFs) characterize the anisotropic impact behavior of ions onto wafer surfaces in cold plasma reactive ion etchers (RIE). IEADFs […]


Plasma Simulations Strategies for Semiconductor Applications

January 3rd, 2018 VizGlow-plasma-simulation

The semiconductor industry is one of the most competitive global markets experiencing consistent month-to-month growth with annual global sales approaching $400B. There is a strong […]


Self-consistent ICP with Bias

December 12th, 2017 icp-plasma-simulation-bias

This VizGlow example describes a self-consistent plasma simulation of an inductively coupled plasma (ICP) with a bias voltage. Typically, a quasi-neutral formulation is preferable over […]


Inductively Coupled Plasma Reactor with Large Gas Chemistries

November 27th, 2017 icp-plasma-simulation-vizglow

Plasma processing reactors are used to accomplish a variety of unit steps in a semiconductor integrated circuit manufacture. In most cases, complex feed gas mixtures […]