Self-consistent ICP with Bias

December 12th, 2017 icp-plasma-simulation-bias

This VizGlow example describes a self-consistent plasma simulation of an inductively coupled plasma (ICP) with a bias voltage. Typically, a quasi-neutral formulation is preferable over self-consistent for high density plasma discharges where Debye lengths become very small relative to geometric dimensions in the discharge. Sheath thickness become negligible compared to the physical system and can be ignored. This is common in ICP and microwave plasmas and under these conditions a quasi-neutral approximation may be made. […]

Inductively Coupled Plasma Reactor with Large Gas Chemistries

November 27th, 2017 icp-plasma-simulation-vizglow

Plasma processing reactors are used to accomplish a variety of unit steps in a semiconductor integrated circuit manufacture. In most cases, complex feed gas mixtures are used in a plasma reactor to realize precise etch, deposition, doping, cleaning and other types of processes.  The VizGlow Plasma Modeling Software Package provide capability for modeling plasma reactors with complex reactive plasma chemistries in the gas phase and at reactive surfaces.  This technical note discusses the simulation of […]

Esgee Technologies Presents at GEC 2017

November 1st, 2017

Esgee Technologies will present “Computational Modeling of Microwave Interactions with Self-consistent Plasma” at the 70th Annual Gaseous Electronics Conference in Pittsburgh, PA on Nov. 7th, 2017. This talk will address current challenges in computational modeling of microwave-sustained plasmas. Examples include discharges sustained by surface wave propagation (SWP) along plasma- dielectric interface (SPP) and discharged sustained by SWP along the plasma-sheath interface (MVP). These are important processes for the creation and sustenance of plasmas in industrial scale plasma reactors […]

Nanosecond Pulsed Dielectric Barrier Discharge in Air

October 15th, 2017

Dielectric Barrier Discharges (DBD) are stable discharges capable of generating reactive non-equilibrium plasmas at high pressures.  Operation of these discharges at atmospheric pressure is particularly attractive for a number of applications including vacuum-chamber free materials processing, chemical processing of gas streams, and plasma actuators for aerodynamic flow control.  In non-ideal gases such as air, DBD’s produce large volume plasmas through the formation of a multitude of thin streamer channels that can fill the available space […]

ICP Reactor with Coupled Plasma, EM Wave and Gas Flow

May 20th, 2017

This application overview discusses the modeling of a flow-through Inductively Coupled Plasma (ICP) reactor with VizGlow and provides an example of tightly coupled multi-physics simulations with the software.  Discharge physics including multi-temperature, multi-species transport, and finite-rate plasma chemistry effects are coupled to electromagnetic wave phenomena driven by inductive coils, and a bulk fluid flow through an inlet/outlet configuration. The geometry and mesh for the plasma discharge simulation are shown in Figure 1.  The axisymmetric discharge comprises a […]