Esgee Technologies Presents at GEC 2017

November 1st, 2017

Esgee Technologies will present “Computational Modeling of Microwave Interactions with Self-consistent Plasma” at the 70th Annual Gaseous Electronics Conference in Pittsburgh, PA on Nov. 7th, 2017. This talk will address current challenges in computational modeling of microwave-sustained plasmas. Examples include discharges sustained by surface wave propagation (SWP) along plasma- dielectric interface (SPP) and discharged sustained by SWP along the plasma-sheath interface (MVP). These are important processes for the creation and sustenance of plasmas in industrial scale plasma reactors […]

EM Wave Propagation in L-bent Waveguide

September 1st, 2017

This application note illustrates the transient development of microwave field in an air-filled waveguide with an L-bend geometric feature.   The Time-Domain Electromagnetic Wave Solver Module of the VizEM Electromagnetics Modeling Software Package developed by Esgee Technologies Inc. is used for this problem. The 2D planar waveguide geometry and the computational mesh used for the simulations of this problem are shown in Figure 1.  The waveguide is 100 cm long in the horizontal direction (x-direction) and […]

Microwave Reactor in the Frequency Domain

May 1st, 2017 3D Microwave Plasma MWP Simulation in VizGlow

This example application simulates a steady microwave field in a three-dimensional plasma reactor using in semiconductor materials processing.  The Frequency-Domain Electromagnetic Wave Solver Module of the VizEM is used for this problem. The geometry for the simulation is shown in Figure 1 and comprises a cylindrical processing reactor with an air-filled waveguide port in the top center of the reactor.  The waveguide is rectangular in cross section and comprises an L-bend with a 45o mirror surface […]