Product

VizGlow

VizGlow-plasma-simulationVizGlow is a robust, industrial simulation tool for high-fidelity modeling of non-equilibrium plasma discharges. As part of the OverViz Simulation Suite, it can be fully coupled with electromagnetic, fluid flow, and kinetic particle models to provide solutions to a wide range of complex multiphysics problems. It has been used to analyze discharges ranging from low pressure plasma reactors at a few mTorr to high pressure streamers at 15atm, all with a single solver. VizGlow is fully parallelized and can be used to perform large, 3D simulations with complex geometries. Its robust solvers and scalability make it ideal for solving real world engineering problems.

Features:

  • 1-D, 2-D (planar/axisymmetric) and 3-D problems
  • Self-consistent (sheath+plasma) and quasi-neutral formulation
  • Multi-species, multi-temperature formulation
  • Finite-rate gas chemistry (complex gas mixtures) and surface chemistry (etching, deposition, etc.)
  • Coupling to electromagnetics, fluid-flow, and particle models
  • Photoionization model
  • Valid over range of pressures ~mTorr to 10+atm.
  • Unstructured mixed mesh framework
  • Parallel computing

Applications:

  • Thin film etching / deposition / cleaning
  • Semiconductor processing
  • Lighting and display
  • Aerodynamic flow control
  • Chemical processing
  • Combustion ignition / stabilization
  • Biomedical (e.g. sterilization)
  • Plasma propulsion
  • Plasma metamaterials

Discharge Types:

Industries Served:

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VizGlow Plasma Applications