Self-consistent ICP with Bias

December 12th, 2017 icp-plasma-simulation-bias

This VizGlow example describes a self-consistent plasma simulation of an inductively coupled plasma (ICP) with a bias voltage. Typically, a quasi-neutral formulation is preferable over self-consistent for high density plasma discharges where Debye lengths become very small relative to geometric dimensions in the discharge. Sheath thickness become negligible compared to the physical system and can be ignored. This is common in ICP and microwave plasmas and under these conditions a quasi-neutral approximation may be made. […]

Inductively Coupled Plasma Reactor with Large Gas Chemistries

November 27th, 2017 icp-plasma-simulation-vizglow

Plasma processing reactors are used to accomplish a variety of unit steps in a semiconductor integrated circuit manufacture. In most cases, complex feed gas mixtures are used in a plasma reactor to realize precise etch, deposition, doping, cleaning and other types of processes.  The VizGlow Plasma Modeling Software Package provide capability for modeling plasma reactors with complex reactive plasma chemistries in the gas phase and at reactive surfaces.  This technical note discusses the simulation of […]

Nanosecond Pulsed Dielectric Barrier Discharge in Air

October 15th, 2017

Dielectric Barrier Discharges (DBD) are stable discharges capable of generating reactive non-equilibrium plasmas at high pressures.  Operation of these discharges at atmospheric pressure is particularly attractive for a number of applications including vacuum-chamber free materials processing, chemical processing of gas streams, and plasma actuators for aerodynamic flow control.  In non-ideal gases such as air, DBD’s produce large volume plasmas through the formation of a multitude of thin streamer channels that can fill the available space […]

DC Non-Transferred Plasma Torch

October 1st, 2017 plasma-torch-simulation-vizglow

VizSpark is used to model a non-transferred direct current plasma torch in pure argon gas assuming axi-symmetry along the central axis.  A steady state thermal plasma with temperatures from 15-20,000 Kelvin forms a supersonic, under expanded jet in the ambient region with visible Mach diamonds. Plasma torches are devices that produce a steady thermal plasma jet.  There are many applications for plasma torches including arc cutting, wielding, plasma spraying and waste treatment. A plasma torch […]

EM Wave Propagation in L-bent Waveguide

September 1st, 2017

This application note illustrates the transient development of microwave field in an air-filled waveguide with an L-bend geometric feature.   The Time-Domain Electromagnetic Wave Solver Module of the VizEM Electromagnetics Modeling Software Package developed by Esgee Technologies Inc. is used for this problem. The 2D planar waveguide geometry and the computational mesh used for the simulations of this problem are shown in Figure 1.  The waveguide is 100 cm long in the horizontal direction (x-direction) and […]